The basic configuration of the mass flow meter consists of a thermal mass flow sensor, a bypass laminar flow element, and a bridge circuit. An electric current is passed through the resistor wound around the sensor to generate heat. When a part of the gas that enters from the inlet flows into the sensor, the temperature distribution of the sensor changes, which is captured by the bridge circuit and taken out as a flow rate output signal.
Compact size allows flow rate measurement up to the 60SLM class area.
- A dedicated power supply is available.
|Flow rate display||LED numeric element Character height (8mm) Red|
|Power supply||DC5V ± 5% 120mA MAX|
|External dimensions||48 (W) x 24 (H) x 73 (D) mm|
|weight||Approximately 46g (main unit only)|