This mass flow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
This mass flow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
The view point change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.
The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.
KOFLOC’s corporate motto is “A Scientific Approach for Fluids.” In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.
| ITEM | 8500MC/MM | 8550MC/MM |
| Flow range | 10SCCM〜20SLM | 30SLM〜100SLM |
| （N2 equivalent 20℃/1ATM） | （freely selectable） | （freely selectable） |
| Sensor type | Thermal sensor | |
| Valve type（*1） | Normally closed proportional solenoid valve | |
| Control range（*1） | 2〜100％（F.S.） | 5〜100％（F.S.） |
| Response（*1） | ≤2sec | ≤3sec |
| (within±2%F.S) | (within±2%F.S.) | |
| Accuracy | ±1.0%F.S.（25℃） | ±1.5%F.S.（25℃） |
| Temperature coefficient | ±0.1F.S./℃（15〜35℃） | ±0.2F.S./℃（15〜35℃） |
| Repeatability | ±0.5%F.S. | |
| Operating differential pressure （*1） |
F.S.≤5SLM 50〜300kPa（G） | F.S.≤50SLM 150〜300kPa（G） |
| F.S.＞5SLM 100〜300kPa（G） | F.S.＞50SLM 200〜300kPa（G） | |
| Option：Medium differential pressure（MP）, low differential pressure（LP） specifications are available |
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| Allowable operating pressure（*1） | 500kPa（G） or less | |
| Proof pressure | 980kPa（G） | |
| Leak rate | ≤1×10−8Pa・㎥/s（excluding permeation of He） | |
| Allowable operating temperature | 5〜45℃ | |
| Allowable operating humidity | 10〜90％RH（No condensation allowed） | |
| Materials of gas contact part | Body : SUS316 | |
| Valve seat : FKM（option : CR or NBR） | ||
| Sealing : FKM（option : CR or NBR） | ||
| Electrical connection | Dsub half pitch 20pin DX10M−20S(HRS) | |
| Flow rate setting signal | 0〜5VDC（input impedance 100kΩ or more) | |
| （*1） | or 4〜20mA selectable | |
| Flow rate output signal | 0〜5VDC（external load resistance 250kΩ or more） or | |
| 4〜20mA （external load resistance 300Ω or less）selectable | ||
| Communication | RS232C（3 wire）or RS485（3 wire） selectable | |
| Other functions | Instantaneous flow rate・integrated flow rate display （ 7-segment 4-digit LED | |
| display accuracy ±1% integrated display 0000〜9999MAX）, | ||
| Alarm output（NPN open collector output 2 points | ||
| Max DC35V 50mA）, pattern setting（5 pattern） function | ||
| Required power supply | 24VDC±10%（ripple 5%） current consumption 300mA max | |
| Joint | Standard 1/4F900（9/16-18UNF） | Standard 3/8F900（9/16−18UNF） |
| （Main unit bore） | Option 1/8F900, 1/4UJR, | Option 1/2F900, 3/8UJR, |
| Rc1/4 etc. | Rc3/8 etc. | |
| Weight | Approx. 1200g | Approx. 1500g |
（*1）Only for mass flow controller.
