Description
This mass flow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
The view point change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.
Specification
ITEM | 8500MC/MM | 8550MC/MM |
Flow range | 10SCCM〜20SLM | 30SLM〜100SLM |
(N2 equivalent 20℃/1ATM) | (freely selectable) | (freely selectable) |
Sensor type | Thermal sensor |
Valve type(*1) | Normally closed proportional solenoid valve |
Control range(*1) | 2〜100%(F.S.) | 5〜100%(F.S.) |
Response(*1) | ≤2sec | ≤3sec |
(within±2%F.S) | (within±2%F.S.) |
Accuracy | ±1.0%F.S.(25℃) | ±1.5%F.S.(25℃) |
Temperature coefficient | ±0.1F.S./℃(15〜35℃) | ±0.2F.S./℃(15〜35℃) |
Repeatability | ±0.5%F.S. |
Operating differential
pressure
(*1) | F.S.≤5SLM 50〜300kPa(G) | F.S.≤50SLM 150〜300kPa(G) |
F.S.>5SLM 100〜300kPa(G) | F.S.>50SLM 200〜300kPa(G) |
Option:Medium differential pressure(MP), low differential pressure(LP)
specifications are available |
Allowable operating pressure(*1) | 500kPa(G) or less |
Proof pressure | 980kPa(G) |
Leak rate | ≤1×10−8Pa・㎥/s(excluding permeation of He) |
Allowable operating temperature | 5〜45℃ |
Allowable operating humidity | 10〜90%RH(No condensation allowed) |
Materials of gas contact part | Body : SUS316 |
Valve seat : FKM(option : CR or NBR) |
Sealing : FKM(option : CR or NBR) |
Electrical connection | Dsub half pitch 20pin DX10M−20S(HRS) |
Flow rate setting signal | 0〜5VDC(input impedance 100kΩ or more) |
(*1) | or 4〜20mA selectable |
Flow rate output signal | 0〜5VDC(external load resistance 250kΩ or more) or |
4〜20mA (external load resistance 300Ω or less)selectable |
Communication | RS232C(3 wire)or RS485(3 wire) selectable |
Other functions | Instantaneous flow rate・integrated flow rate display ( 7-segment 4-digit LED |
display accuracy ±1% integrated display 0000〜9999MAX), |
Alarm output(NPN open collector output 2 points |
Max DC35V 50mA), pattern setting(5 pattern) function |
Required power supply | 24VDC±10%(ripple 5%) current consumption 300mA max |
Joint | Standard 1/4F900(9/16-18UNF) | Standard 3/8F900(9/16−18UNF) |
(Main unit bore) | Option 1/8F900, 1/4UJR, | Option 1/2F900, 3/8UJR, |
| Rc1/4 etc. | Rc3/8 etc. |
Weight | Approx. 1200g | Approx. 1500g |
(*1)Only for mass flow controller.