Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic
Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction
The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.
KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.
| Flow range (N2 equivalent, 20℃/1 atm) | 1 SCCM–20 SLM (The conditions are freely selectable) |
| Sensor | Thermal mass flow sensor |
| Valve type | Proportional solenoid valve (closed when not energized) |
| Control range | 2–100% (F.S.) |
| Response | 1 sec. or less (0–100% within ±2% typical) |
| Accuracy | ±1% F.S. (Accuracy guaranteed at 15–35℃) |
| Repeatability | ±0.2%F.S. |
| Operating differential pressure | F.S. ≤ 5 SLM: 50–300 kPa |
| F.S. > 5 SLM: 100–300 kPa | |
| Option: Low differential pressure (LP) specification is available depending on conditions. | |
| Allowable operating pressure | 300 kPa (G) or less |
| Proof pressure | 980 kPa (G) |
| Leak rate | 1 × 10-11 Pa·m3/s or less |
| Allowable ambient temperature | 0–50℃ |
| Allowable ambient humidity | 10–90% (No condensation allowed) |
| Materials of parts in contact with gases | Body: SUS316L |
| Diaphragm:SUS316L | |
| Valve seat: PTFE | |
| Sealing: SUS316L, Ni, Au | |
| Option: SUS seal (SU), inner surface polish (KP) | |
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) |
| Required power supply | +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA |
| Joint (Main unit bore) | Standard: 1/4 VCR equivalent Option: 1/4 SWL |
| Weight | Approx. 1000 g |
!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Contact us with your specification for assessment and availability of other products configurations.
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