Kofloc Model 5100 Mass Flow Controller

Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic


Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction




The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.


  • High accuracy and high response are achieved by the flow sen-sor with temperature-following current difference detection.
  • A normally-closed solenoid valve is employed.
  • A low leak rate is achieved by the weldless structure and metalseal.
  • The dead volume is reduced thanks to the diaphragm seat valve.
  • The face-to-face and body dimensions and the wiring tie-inpoints are designed to facilitate replacement of devices made by other companies.


  • Air sampling
  • Analyzer component
  • Bioreactor
  • Biotechnological process
  • Burn control
  • CCFL manufacturing
  • Chamber pressure control
  • Chemical process
  • Environment monitoring
  • Electronic device manufacturing
  • Food production
  • Fuel cell testing
  • Fermentation process
  • Gas blending
  • Gas distribution
  • Gas flow monitoring
  • Gas generation
  • Industrial furnace
  • Leak testing
  • Pharmaceutical process
  • Pollution monitoring
  • Process flow control
  • R&D
  • Solar power element manufacturing
  • Secondary calibration reference
  • Semiconductor process
  • Surface treatment process
  • Thermal flame spray
  • Thin film manufacturing
  • Vapor deposition




Flow range (N2 equivalent,
20℃/1 atm)
1 SCCM–20 SLM (The conditions are freely selectable)
SensorThermal mass flow sensor
Valve typeProportional solenoid valve (closed when not energized)
Control range2–100% (F.S.)
Response1 sec. or less (0–100% within ±2% typical)
Accuracy±1% F.S. (Accuracy guaranteed at 15–35℃)
Operating differential
F.S. ≤ 5 SLM: 50–300 kPa
F.S. > 5 SLM: 100–300 kPa
Option: Low differential pressure (LP) specification is available depending on conditions.
Allowable operating pressure300 kPa (G) or less
Proof pressure980 kPa (G)
Leak rate1 × 10-11 Pa·m3/s or less
Allowable ambient temperature0–50℃
Allowable ambient humidity10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316L
Valve seat: PTFE
Sealing: SUS316L, Ni, Au
Option: SUS seal (SU), inner surface polish (KP)
Electric connectionDsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore)Standard: 1/4 VCR equivalent Option: 1/4 SWL
WeightApprox. 1000 g

Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

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