Description
In comparison with the conventional mechanical products, the mass flow measurement/control technology used in a mass flow meter and controller extracts electrical signals from the flow without significantly influencing the temperature or pressure, thus permitting sophisticated flow measurement and control.
The technology is widely used for manufacturing semiconductors, liquid crystal, optical fibers and other electronic devices, gas supply for fuel cells, and fuel gas control for burners, foods, biotechnology, as well as for experimental facilities and production/inspection systems in many other industries.
Specification
| Model | Mass flow controller EX-250SC | Mass flow meter EX-250SM |
| Sensor type | Thermal sensor |
| Valve type | Proportional solenoid valve (normally closed | ー |
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2 (The other gases are N2 gas conversion) |
| Flow range*2 | 10SCCM-5SLM |
| Control Range | 2-100% (F.S.) |
| Response: | Total flow rate control range ±1 sec (within ±2% F.S.) |
| L:50kPa-149kPa H:150kPa-300kPa | ー |
| Accuracy *3 | ±1.0%F.S. |
| Repeatability | ±0.2%F.S. |
| Operating differential pressure *4 | 50-300kPa (Ar, CO2:100kPa-300kPa) | ー |
| Inlet maximum pressure | 500kPa (G) |
| Proof pressure | 980kPa (G) |
| External leak rate *5 | ≦ 1×10-8Pa·m3/sec |
| Temperature | Working temp. | 5-50°C |
| Accuracy guaranteed temp. | 15-35°C |
| Allovwable storage temp. | -10-60°C |
| Allowable operating humidity | 10-90% RH (without dew condensation) |
| Materials of gas contact part | SUS316, SUS316L, Magnetic stainless steel (*6), PTFE, FKM |
| Electrical connection | Dsub9 pin KFC Standard (SEMI standard) HR-10A |
| Flow rate setting signal | 0-5VDC (Input impedance approx.1MΩ) 4-20mA (Input impedance approx.250Ω) | ー |
| Flow rate output signal | 0-5VDC or 4-20mA |
| Digital communication | RS485 |
| Required power supply (DC) | +15VDC (+/-5%) less than 100mA, -15VDC (+/-5%) less than 150mA Or +24VDC (+/-10%) less than 180mA (MFM: less than 100mA) |
| Joint *7 | 1/4SWL type (standard) |
| Mounting posture | Horizontal installation recommended. |
| Weight *8 | Approx. 500g | Approx. 440g |
（*1）The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
（*2）The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
（*3）Accuracy for calibration gas: N2, flow range (max. full scale).
（*4）The operating differential pressure may differ depending on specifications.
（*5）Mass flow meter does not contain magnetic stainless steel.
（*6）Contact us for any other joints.
（*7）Exclusive of weight of joint.
（*8）Pressure condition would be needed when you order.
