Kofloc EX-201S Mass Flow Controllers

Description

The Kofloc Model EX-201S is engineered for the evolving needs of the semiconductor, biotechnology, and analytical industries. Unlike traditional analog controllers limited to a single factory calibration, the EX-201S features digital intelligence. Its defining feature, the MG/MR function, empowers users to reconfigure the controller for different gases (such as $N_2$ , $O_2$ , $Ar$ , $H_2$ , $He$ , $CO_2$ , and $CH_4$ ) and adjust the full-scale range within 30% to 100% of its original capacity.

A Mass Flow Controller (MFC) is a device used to precisely regulate and control gas mass flow in various industrial and laboratory processes. Unlike conventional flow meters, which only measure velocity or volume, an MFC can both measure and regulate gas flow based on mass, resulting in much more accurate results—especially in applications that require tight and consistent control, such as the semiconductor, pharmaceutical, chemical, and gas analysis industries.

Brand

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Specifications

Sensor type : Thermal sensor
Valve type : Proportional solenoid valve (normally closed)
Applicable gas : N₂ (Air, H₂, He, Ar, O₂, CO₂, CH₄/C.F. input)
Full-scale flow rate : (N2 equivalent) 10/30/50/100/300/500SCCM 1/3/5/10SLM
Control range 2～100%F.S.
Within 1sec. (within ±2% F.S.)
（F.S.＜10SLM L:50～149KPa H:150～300KPa）
（F.S. 10SLM L:100～149KPa H:150～350KPa）
Accuracy :±1%S.P.(＞35%F.S.) ±0.35%F.S.(≦35%F.S.)
Repeatability ±0.2%F.S
F.S.＜10SLM 50～300KPa(Ar CO₂:100～300KPa)
F.S.10SLM 100～350KPa(Ar CO₂:150～300KPa)
Max. inlet pressure 500kPa(G)
Proof pressure 1MPa(G)
He leak rate 侑 1 × 10-8Pa·m3/s
Allowable ambient temperature 5～50℃
Accuracy guarantee temperature 15～35℃
Allowable storage temperature -10～60℃
Allowable ambient humidity 10%RH to 90%RH (no dew condensation)
Materials of parts in contact with gases SUS316L, SUS316, Magnetic stainless steel, PTFE, FKM (option: NBR or FFKM)
Electrical connection D-sub 9 pins　RJ45 connector, 2pcs
Flow rate setting signal 0 to 5VDC (Input impedance: Approx. 1MΩ) or 4 to 20mA (Input i

Features

MG/MR Capability: Reconfigure gas types and flow ranges in the field via software.
High-Speed Response: Reaches set-point stability in $leq 1$ second across the entire range.
Dual Interface: Supports both analog (0-5V / 4-20mA) and digital (RS485) input/output.

Applications

Semiconductor Processing: Precise control of purge and carrier gases in etching and deposition.
Biotechnology: Managing $O_2$ and $CO_2$ ratios in bioreactors and fermenters.
Fuel Cell Research: Regulating $H_2$ and Air supply for performance testing.
Analytical Chemistry: Carrier gas control for gas chromatography and mass spectrometry.
Gas Blending Systems: Creating custom gas mixtures with high repeatability.