Kofloc Flow Meters with with Bellows Needle Valve Model RK1500 SERIES

The Kofloc RK1500 Series represents the gold standard in manual gas flow management for the semiconductor and chemical industries.

Description

The Kofloc RK1500 Series represents the gold standard in manual gas flow management for the semiconductor and chemical industries. The core innovation of this series is the Bellows-sealed structure within the needle valve. In conventional valves, the stem is sealed by an elastomer O-ring which can wear over time or outgas, potentially contaminating the gas stream. The RK1500 utilizes a metal bellows to hermetically seal the internal mechanism from the external environment.

Brand

Kofloc

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Specifications

  • Applicable fluids N2, Air, H2, He, Ar, O2, CO2
  • Max Flow range (atm condition for gas) 5L/min to 30L/min
  • Effective scale 10:1
  • Accurancy ±2%F.S
  • Proof pressure 100mL/min or less : 1MPa(G) 5L/min or less : 0.7MPa(G) 10L/min or more : 0.5MPa(G)
  • Working ambient temperature 60℃
  • Weight Approx. 800g
  • Connection standard:1/4SWL type, option : 1/8SWL type1/4VCR type

Features

  • Precision Manual Control: High-resolution needle valve allows for repeatable, minute flow adjustments.

  • All-Stainless Construction: Wetted parts are SUS316, providing superior chemical resistance.

  • High Visibility: Long, 120mm to 150mm scale lengths for easy and accurate flow verification.

Applications

  • Semiconductor Processing: Controlling specialty gas flows (etching, deposition) in cleanroom environments.

  • Toxic Gas Handling: Safe regulation of chlorine, ammonia, and other hazardous chemical vapors.

  • Analytical Benches: High-purity carrier gas control for GC-MS and ICP-MS systems.

  • Photovoltaic Production: Managing dopant gases in solar cell manufacturing.

  • Corrosive Fluid Measurement: Handling aggressive liquids or gases that would degrade standard seals.