Description
The Kofloc 5410 Series is a high-performance mass flow meter (MFM) specifically engineered for applications requiring extreme cleanliness and high precision. Its standout feature is the all-metal seal construction, which makes it ideal for high-vacuum processes and the handling of hazardous or corrosive gases.
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A Mass Flow Controller (MFC) is a device used to precisely regulate and control gas mass flow in various industrial and laboratory processes. Unlike conventional flow meters, which only measure velocity or volume, an MFC can both measure and regulate gas flow based on mass, resulting in much more accurate results—especially in applications that require tight and consistent control, such as the semiconductor, pharmaceutical, chemical, and gas analysis industries.
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Features
Key Features and Design
Unlike standard flow meters that use Viton or Kalrez O-rings, the 5410 Series utilizes metal gaskets (typically stainless steel or special alloys). This provides several technical advantages:
- Low Outgassing: Ideal for semiconductor manufacturing where even trace impurities can ruin a wafer.
- High Hermeticity: The metal seals ensure a leak rate of less than 1 x 10-11 PA , m3 sec (He), preventing atmospheric contamination.
- Corrosion Resistance: Compatible with aggressive gases that would otherwise degrade synthetic rubbers.
- High Precision: Features a high-speed response and high-accuracy thermal sensor technology.
Applications
- Semiconductor & CVD: Precise gas dosing for thin-film deposition.
- Vacuum Coating: Maintaining stable environments for optical or industrial coatings.
- Fuel Cell Research: Measuring hydrogen and oxygen flow with high safety standards.
- Analytical Chemistry: Used in gas chromatography or specialized lab environments where “zero-leak” integrity is mandatory.
Note: Because this is a Meter (MFM) and not a Controller (MFC), it is designed to measure and report flow data but does not contain an internal proportional valve to actively regulate the flow.
