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Kofloc, Model 5100 Series-Mass Flow Controller

Kofloc Model 5100 Mass Flow Controller

The Kofloc Model 5100 Mass Flow Controller (MFC) is a high-precision digital-analog instrument designed for the automated regulation of gas flow. By combining a sophisticated thermal mass flow sensor with a high-speed proportional solenoid valve and advanced closed-loop control circuitry, the Model 5100 provides stable gas delivery that is entirely independent of temperature and pressure fluctuations.

Compact and robust, it is the go-to solution for researchers and engineers who require a dependable, industrial-grade controller for gas blending, furnace control, and semiconductor processing.

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Description

The Kofloc Model 5100 operates on the principle of thermal mass flow measurement. It features a sensor that detects the heat transfer caused by gas molecules passing through a capillary tube. This data is processed by an onboard bridge circuit, which then commands a precision solenoid valve to reach the desired set-point.

Unlike manual flowmeters with needle valves, the Model 5100 is a “closed-loop” system. If the supply pressure drops or the backpressure increases, the controller instantly detects the change in flow and adjusts the valve position to maintain the exact flow rate requested by your PLC or control system. Its Stainless Steel (SUS316) construction and high-speed response (typically under 2 seconds) ensure that your process remains stable and repeatable, even in dynamic industrial environments.

Brand

Kofloc

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Features

  • Mass Flow Technology: Direct control of gas mass, eliminating the need for pressure or temperature correction.
  • Rapid Response: High-speed solenoid valve reaches the target flow rate in approximately 2 seconds.
  • High Accuracy: Precision calibrated to within $pm$2.0% Full Scale.
  • Closed-Loop Reliability: Continuous self-adjustment to maintain set-points under changing conditions.
  • Compact Footprint: Standard dimensions for easy integration into gas panels and OEM equipment.
  • Durable Wetted Parts: Built with SUS316 and Viton/FKM for compatibility with a wide range of non-corrosive gases.

Specification

FeatureSpecification
Control Range2% to 100% of Full Scale
AccuracyWithin $pm$2.0% F.S. (at 25°C)
RepeatabilityWithin $pm$0.5% F.S.
Response Time$leq$ 2 seconds (typical)
Applicable GasesAir, $N_2$, $Ar$, $CO_2$, $O_2$, $H_2$, $He$, $CH_4$
Max Operating Pressure490 kPa (0.49 MPa)
Control Signal0–5V DC (Standard)
Power Requirement$pm$15V DC or +24V DC (Model dependent)
Wetted MaterialsSUS316, Fluororubber (Viton), PTFE

Applications

The Kofloc Model 5100 Mass Flow Controller is an essential component for:

  • Gas Mixing Systems: Precisely blending multiple gases for specialized industrial atmospheres.
  • Semiconductor Processing: Managing precursor and purge gas flows in CVD/PVD tools.
  • Heat Treatment Furnaces: Controlling protective gas levels (Nitrogen/Argon) during metal processing.
  • Fuel Cell Test Stands: Managing exact stoichiometric ratios of Hydrogen and Oxygen.
  • Biotechnology: Controlling $CO_2$ and $O_2$ levels in fermentation and cell culture.

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