Kofloc EX-550 SERIES Mass Flow Controllers

Description

The Kofloc Model EX-550 Series is engineered to meet the stringent “cleanliness” requirements of the modern electronics and specialty chemical industries. The defining characteristic of the EX-550 is its all-metal seal construction. Unlike standard controllers that use FKM or NBR O-rings, the EX-550 features a weldless SUS316L body with metal seals, which eliminates the risk of contamination from plasticizers and prevents the absorption/permeation of moisture and atmospheric gases

A Mass Flow Controller (MFC) is a device used to precisely regulate and control gas mass flow in various industrial and laboratory processes. Unlike conventional flow meters, which only measure velocity or volume, an MFC can both measure and regulate gas flow based on mass, resulting in much more accurate results—especially in applications that require tight and consistent control, such as the semiconductor, pharmaceutical, chemical, and gas analysis industries.

Brand

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Specifications

Sensor type Thermal sensor
Valve TYpe Proportional solenoid valve (normally closed)
Applicable gas N₂ (Air, H₂, He, Ar, O₂, CO₂)
Full-scale flow rate 5SCCM to 10SLM
Control range 2 to 100%F.S.
Response Within 1sec (within ±2% F.S.) (within 2sec for F.S. 5SCCM specification) (L:50 to 149kPa H:150 to 300kPa)
Accuracy ±1%S.P (25 to 100%F.S)
Repeatability ±0.2%F.S.
Max. inlet pressure 350kPa(G)
Proof preasure 1MPa(G)
Allowable ambient temperature 5 to 50℃
Accuracy guarantee temperature 15 to 35℃
Allowable storage temperature -10 to 60℃

Features

Digital & Analog I/O: Supports RS485 (Modbus) communication alongside traditional 0–5V or 4–20mA signals.
Compact High-Density Design: Ideal for integration into gas boxes and high-purity gas panels
Weldless Body Construction: Minimizes dead zones and potential leak paths for ultra-clean performance.

Applications

Semiconductor Etch & CVD: Precise delivery of high-purity process gases with zero contamination.
Optical Fiber Manufacturing: Handling corrosive dopant gases in ultra-clean environments.
Analytical Mass Spectrometry: Controlling carrier gases where background noise must be eliminated.