Kofloc 3200 SERIES Mass Flow Controllers

Description

The Kofloc Model 3200 Series is a cornerstone of Kofloc’s mass flow lineup, engineered for those who value the simplicity and speed of analog control. While digital models offer software-based features, the 3200 focuses on hardware-level precision. It utilizes a sophisticated thermal mass flow sensor that detects flow rates by measuring heat transfer, making it independent of gas temperature and pressure variations.

A Mass Flow Controller (MFC) is a device used to precisely regulate and control gas mass flow in various industrial and laboratory processes. Unlike conventional flow meters, which only measure velocity or volume, an MFC can both measure and regulate gas flow based on mass, resulting in much more accurate results—especially in applications that require tight and consistent control, such as the semiconductor, pharmaceutical, chemical, and gas analysis industries.

Brand

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Specifications

Sensor type Thermal sensor
Valve TYpe Proportional solenoid valve (normally closed)
Applicable gas N₂ (Air, H₂, He, Ar, O₂, CO₂)
Full-scale flow rate 1SCCM to 20SLM
Control range 2 to 100%F.S.
Response Within 1sec (within ±2% F.S.)
Accuracy ±1%F.S.
Repeatability ±0.2%F.S.
Max. inlet pressure 300kPa(G)
Proof preasure 1MPa(G)
Allowable ambient temperature 0 to 50℃
Accuracy guarantee temperature 15 to 35℃
Allowable storage temperature -10 to 60℃

Features

Robust Thermal Sensor: Minimizes drift and ensures long-term calibration stability.
Low Pressure Drop: Optimized internal geometry maintains flow efficiency across the valve.
High-Quality Materials: SUS316 construction with FKM seals for broad compatibility with technical gases

Applications

Vacuum Thin-Film Deposition: Precise control of sputtering and reactive gases.
Analytical Equipment: Regulating carrier and detector gases for chemical analyzers.
Environmental Monitoring: Maintaining steady flows for gas sampling and calibration.
Combustion Research: Controlling fuel-to-air ratios in precision burner systems.