Kofloc Mass Flow Controllers Model 5100 SERIES

The Kofloc Model 5100 Series represents a significant leap in digital flow control technology.

Description

The Kofloc Model 5100 Series represents a significant leap in digital flow control technology. While standard controllers often struggle with stabilization times, the 5100 utilizes a high-performance thermal mass flow sensor and a refined digital PID control algorithm to reach its set-point in <1 second. This speed is critical for processes with short cycle times or those requiring immediate stabilization to prevent reagent waste

Brand

Kofloc

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Specifications

  • Sensor type Thermal sensor
  • Valve TYpe Proportional solenoid valve (normally closed)
  • Applicable gas N₂, Air, H₂, He, Ar, O₂, CO₂
  • Full-scale flow rate 1SCCM to 20SLM
  • Control range 2 to 100%F.S.
  • Response Within 1sec.
  • Accuracy ±1%F.S.
  • Repeatability ±0.2%F.S.
  • Max. inlet pressure 300kPa(G)
  • Proof preasure 1MPa(G)
  • Allowable ambient temperature 0 to 50℃
  • Accuracy guarantee temperature 15 to 35℃
  • Allowable storage temperature -10 to 60℃

Features

  • Ultra-Fast Response: Achieves flow stability in <1 second, enhancing process efficiency.

  • MG/MR Capability: Reconfigure gas types and flow ranges in the field via software.

  • Dual Communication: Supports both digital (RS485) and analog (0–5V or 4–20mA) signals.

Applications

  • Semiconductor Processing: Rapid control of purge gases and non-corrosive process gases.

  • Biotechnology: Precise $O_2$ and $CO_2$ regulation for high-throughput bioreactors.

  • Analytical Instrumentation: High-speed carrier gas management for rapid GC systems.

  • Vacuum Coating: Accurate reactive gas delivery in sputtering and CVD processes.

  • Fuel Cell Research: Managing reactant gases ($H_2$ and Air) for performance testing.

  • Gas Mixing Systems: Creating dynamic gas blends with high repeatability.