Kofloc Model 3660 Mass Flow Controller

Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications,


Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.




The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.


  • Equipped with an advanced flow sensor of constant-current tem-perature difference detection type to ensure high-speed response
  • Use of a normally closed valve to ensure safety
  • High reliability ensured using a solenoid actuator
  • Low differential pressure type control available for combustible gases (LP option)


  • Air sampling
  • Analyzer component
  • Bioreactor
  • Biotechnological process
  • Burn control
  • CCFL manufacturing
  • Chamber pressure control
  • Chemical process
  • Environment monitoring
  • Electronic device manufacturing
  • Food production
  • Fuel cell testing
  • Fermentation process
  • Gas blending
  • Gas distribution
  • Gas flow monitoring
  • Gas generation
  • Industrial furnace
  • Leak testing
  • Pharmaceutical process
  • Pollution monitoring
  • Process flow control
  • R&D
  • Solar power element manufacturing
  • Secondary calibration reference
  • Semiconductor process
  • Surface treatment process
  • Thermal flame spray
  • Thin film manufacturing
  • Vapor deposition


Flow range (N2 equivalent,
20℃/1 atm)
10 SCCM–20 SLM (freely
30 SLM–100 SLM (freely
SensorThermal mass flow sensor
Valve typeProportional solenoid valve (closed when not energized)
Control range2–100% (F.S.)5–100% (F.S.)
Response2 sec. or less (0–100% within
±2% typical)
3 sec. or less (0–100% within
±2% typical)
Accuracy±1.0% F.S. (25℃)±1.5% F.S. (25℃)
Temperature coefficient±0.1 F.S./℃ (15–35℃)±0.2 F.S./℃ (15–35℃)
Operating differential
F.S. ≤ 5 SLM: 50–300 kPa (G)F.S. ≤ 50 SLM: 150–300 kPa (G)
F.S. > 100 SLM: 50–300 kPa (G)F.S. > 50 SLM: 200–300 kPa (G)
Option: Medium differential pressure (MP) and low differential
pressure (LP) specifications are available.
Allowable operating pressure500 kPa (G) or less
Proof pressure980 kPa (G)
Leak rate1 × 10-8 Pa・m3/s or less (excluding permeation of He)
Allowable ambient temperature5–45°C
Allowable ambient humidity10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316
Valve seat: FKM (option: CR or NBR)
Sealing: FKM (option: CR or NBR)
Electric connectionDsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard
Flow rate input signals0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA
Joint (Main unit bore)Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc.
Standard: 3/8SWL
Option: 1/2SWL 3/8VCR RC3/8, etc.
WeightApprox. 1000 gApprox. 1500 g

Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

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