Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.
|Flow range (N2 equivalent,|
|10 SCCM–20 SLM (freely|
|30 SLM–100 SLM (freely|
|Sensor||Thermal mass flow sensor|
|Valve type||Proportional solenoid valve (closed when not energized)|
|Control range||2–100% (F.S.)||5–100% (F.S.)|
|Response||2 sec. or less (0–100% within|
|3 sec. or less (0–100% within|
|Accuracy||±1.0% F.S. (25℃)||±1.5% F.S. (25℃)|
|Temperature coefficient||±0.1 F.S./℃ (15–35℃)||±0.2 F.S./℃ (15–35℃)|
|F.S. ≤ 5 SLM: 50–300 kPa (G)||F.S. ≤ 50 SLM: 150–300 kPa (G)|
|F.S. > 100 SLM: 50–300 kPa (G)||F.S. > 50 SLM: 200–300 kPa (G)|
|Option: Medium differential pressure (MP) and low differential|
pressure (LP) specifications are available.
|Allowable operating pressure||500 kPa (G) or less|
|Proof pressure||980 kPa (G)|
|Leak rate||1 × 10-8 Pa・m3/s or less (excluding permeation of He)|
|Allowable ambient temperature||5–45°C|
|Allowable ambient humidity||10–90% (No condensation allowed)|
|Materials of parts in|
contact with gases
|Valve seat: FKM (option: CR or NBR)|
|Sealing: FKM (option: CR or NBR)|
|Electric connection||Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard|
|Flow rate input signals||0–5 VDC (Input impedance: 1 MΩ or more)|
|Flow rate output signals||0–5 VDC (External load resistance: 250 kΩ or more)|
|Required power supply||+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA|
|Joint (Main unit bore)||Standard: 1/4SWL|
Option: 1/8SWL 1/4VCR RC1/4, etc.
Option: 1/2SWL 3/8VCR RC3/8, etc.
|Weight||Approx. 1000 g||Approx. 1500 g|
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.