Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications,
Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.
The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.
KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.
| Model | 3660 | 3665 |
| Flow range (N2 equivalent, 20℃/1 atm) | 10 SCCM–20 SLM (freely selectable) | 30 SLM–100 SLM (freely selectable) |
| Sensor | Thermal mass flow sensor | |
| Valve type | Proportional solenoid valve (closed when not energized) | |
| Control range | 2–100% (F.S.) | 5–100% (F.S.) |
| Response | 2 sec. or less (0–100% within ±2% typical) | 3 sec. or less (0–100% within ±2% typical) |
| Accuracy | ±1.0% F.S. (25℃) | ±1.5% F.S. (25℃) |
| Temperature coefficient | ±0.1 F.S./℃ (15–35℃) | ±0.2 F.S./℃ (15–35℃) |
| Repeatability | ±0.5%F.S. | |
| Operating differential pressure | F.S. ≤ 5 SLM: 50–300 kPa (G) | F.S. ≤ 50 SLM: 150–300 kPa (G) |
| F.S. > 100 SLM: 50–300 kPa (G) | F.S. > 50 SLM: 200–300 kPa (G) | |
| Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available. | ||
| Allowable operating pressure | 500 kPa (G) or less | |
| Proof pressure | 980 kPa (G) | |
| Leak rate | 1 × 10-8 Pa・m3/s or less (excluding permeation of He) | |
| Allowable ambient temperature | 5–45°C | |
| Allowable ambient humidity | 10–90% (No condensation allowed) | |
| Materials of parts in contact with gases | Body: SUS316 | |
| Valve seat: FKM (option: CR or NBR) | ||
| Sealing: FKM (option: CR or NBR) | ||
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard | |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) | |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) | |
| Required power supply | +15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA | |
| Joint (Main unit bore) | Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. | Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc. |
| Weight | Approx. 1000 g | Approx. 1500 g |
!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Contact us with your specification for assessment and availability of other products configurations.
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