The Model 3100 Series Mass Flow Meter is a new, ad-vanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability
The Model 3100 Series Mass Flow Meter is a new, ad-vanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability
The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.
KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.
| Flow range (at N2 calibration conditions) | 10SCCM-20SLM |
| Response | 1 sec. or less to within ±2% of full scale of final value typical for 0-100% response |
| Accuracy | Within ±1.0% F.S./3100 |
| Linearity | Within ±0.5% F.S. |
| Repeatability | Within ±0.2% F.S. |
| Proof pressure | 980kPa |
| Leak rate | 1×10-8 Pa·m3/s or less (excluding transmission of He) |
| Working temperature range | 0-50℃ (Accuracy guarantee: 15-35℃) |
| Materials of parts exposed to gases | Body: SUS 316L, SUS 316, PTFE Seals: Viton® (Optional: Neoprene®) |
| Joint | Standard: 1/4SWL® |
| Optional: 1/8SWL® 1/4VCR® RC1/4®, etc. | |
| Electrical connections | Dsub 9-pin male connector per KFC standard (SEMI standard) |
| Flow rate output signals | 0-5VDC |
| Required power supply* | +15VDC (±5%) 100mA, –15VDC (±5%) 100mA |
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