Kofloc 3100 SERIES Mass Flow Controllers

Description

The Kofloc Model 3100 Series is designed to bridge the gap between laboratory accuracy and industrial durability. At the heart of the 3100 is a bridge-type thermal mass flow sensor. This sensor measures the mass flow rate of the gas directly, meaning it is unaffected by fluctuations in temperature or pressure—ensuring your process remains consistent regardless of environmental changes.

A Mass Flow Controller (MFC) is a device used to precisely regulate and control gas mass flow in various industrial and laboratory processes. Unlike conventional flow meters, which only measure velocity or volume, an MFC can both measure and regulate gas flow based on mass, resulting in much more accurate results—especially in applications that require tight and consistent control, such as the semiconductor, pharmaceutical, chemical, and gas analysis industries.

Brand

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Specifications

Sensor type Thermal sensor
Valve TYpe Proportional solenoid valve (normally closed)
Applicable gas N₂ (Air, H₂, He, Ar, O₂, CO₂)
Full-scale flow rate 1SCCM to 20SLM
Control range 2 to 100%F.S.
Accuracy ±1%F.S.
Repeatability ±0.2%F.S.
Max. inlet pressure 500kPa(G)
Proof preasure 1MPa(G)
Allowable ambient temperature 0 to 50℃
Accuracy guarantee temperature 15 to 35℃
Allowable storage temperature -10 to 60℃

Features

Precision Solenoid Valve: Features a high-resolution proportional valve for stable, flicker-free control.
Linear Analog Interface: Standard 0–5V DC signals for both flow setting and monitoring.
Robust SUS316 Body: Machined stainless steel for enhanced durability and gas compatibility.

Applications

Semiconductor R&D: Precise control of purge and process gases in experimental chambers.
Analytical Chemistry: Managing carrier gas flow for gas chromatography and TOC analyzers.
Vacuum Coating: Regulating reactive gases in sputtering and evaporation processes.
Environmental Monitoring: Maintaining consistent flow for high-accuracy gas sampling.
Burner & Furnace Control: Fine-tuning the fuel-to-oxidizer ratios in precision thermal systems.