FCON GFM Series Gas Flow Meter

Mass flow Controller controls the gas flow automatically by an electric signal. In order to control the flow rate by measuring mass of a gas, corrections of ambient temperature or use pressure is not required.

Description

Mass flow Controller controls the gas flow automatically by an electric signal. In order to control the flow rate by measuring mass of a gas, corrections of ambient temperature or use pressure is not required. It uses a variety of process such as semiconductor, flat panel display, solar cell panel, that is required high accuracy. However, our products can be used any process, for example, it can be used in industries such as gas filling, gas welding, sintering, vapor deposition, coating, film formation, optical fiber, analysis,environment related equipment.

  • Compact size: W135 x H60 x D60mm (excluding protrusions).
  • Up to 5 lines can be connected.
  • Can be used with AC100-240V.
  • Output: ± 15VDC (drive power supply), 0-5VDC (flow rate output), 5VDC (display power supply).

The following 3 types of signal cables can be provided (* indicates the cable length)

  1. Signal cable between GFM and PA02M (SC-M- *).
  2. Signal cable between PA02M and display (SC-PM- *).
  3. PA02M-Signal cable with display (SC-DPM- *).

*For details, please refer to the catalog and do not hesitate to contact us if you have any questions.

Brand

FCON

FCON

We aim to become a company that is continually welcomed by society by providing products and services based on unique technology and new value creation. FCON main business is design development, manufacture and sale of mass flow controllers and their applied products.

Features

  • Equipped with a mass flow sensor.
  • Supports up to 200LM in compact size.
  • Low pressure loss : Low loss due to simple flow path structure.
  • Flow output signal : Analog (0-5VDC).
  • Drive power supply (± 15V) and signal cable are required separately.
  • It can be used in a wide range of fields such as flow rate measurement with various equipment such as various pumps and vacuum equipment, environmental measurement, factory equipment, and experimental equipment.
  • Upon request, we will issue a certificate, report, and traceability system diagram for flow rate calibration of our products for a fee.

Applications

  • Air
  • N2

Specifications

Type GFM050 GFM100 GFM200
Flow range 50LM 100LM 200LM
Gases Air, N2
Flow rate range 0-100% F.S
Accuracy 0-19%:±3% F.S.、20-100%:±2% F.S.(25℃)
Repeatability ±0.5% F.S
Response ≦10sec
Pressure resistance 1MPa(G)
Output signal Analog : 0-5VDC
Operating temperature 5-50℃, ≦85%RH (Scope of accuracy guarantee : 15-35℃)
Mounting attitude Free
Drive power source ±15VDC±5%、40mA
Wetted surface material Aluminum (A6061), SUS316L, SS (Trivalent chromate plating), Fluoro-Rubber
Seal material Fluoro-Rubber
Surface treatment Machined finish
Standard fitting 3 / 8R male (SS (Trivalent chromate plating)) ※Please use a conversion joint if you need a joint other than 3/8R(Male).
Weight 300g
Accessory User’s manual, Written guarantee

**The flow rate unit “LM” is calibrated at 25 ° C and 1013 kPa abs (1 atm). If you wish to calibrate at 0 ° C or 20 ° C, please specify separately.