Mass flow Controller controls the gas flow automatically by an electric signal. In order to control the flow rate by measuring mass of a gas, corrections of ambient temperature or use pressure is not required. It uses a variety of process such as semiconductor, flat panel display, solar cell panel, that is required high accuracy. However, our products can be used any process, for example, it can be used in industries such as gas filling, gas welding, sintering, vapor deposition, coating, film formation, optical fiber, analysis,environment related equipment.
- Compact size: W135 x H60 x D60mm (excluding protrusions).
- Up to 5 lines can be connected.
- Can be used with AC100-240V.
- Output: ± 15VDC (drive power supply), 0-5VDC (flow rate output), 5VDC (display power supply).
The following 3 types of signal cables can be provided (* indicates the cable length)
- Signal cable between GFM and PA02M (SC-M- *).
- Signal cable between PA02M and display (SC-PM- *).
- PA02M-Signal cable with display (SC-DPM- *).
*For details, please refer to the catalog and do not hesitate to contact us if you have any questions.