Gas mixer [CUBEGM-X series] is a touch panel type gas mixer with mass flow controllers, control power supplies, valves, check valve and gas mixers all in one. Flow rate setting is easy, program operation is possible by setting the flow rate and time of each line.
In addition, we equipped an alarm function that allows upper and lower limits of each line reference flow rate to be set, and improved operability and functionality. Just by connecting the piping to the IN side fitting and the OUT side fitting, several kinds of gases are set and controlled at an arbitrary flow rate, and mixed gas is supplied. Rather than purchasing a gas cylinder adjusted to your desired mixing ratio, running cost will be reduced if each gas is adjusted and mixed with a gas mixer.
||CUBEGM-X2 : W350×D400×H280(mm) ※Except protrusion
CUBEGM-X3 : W430×D400×H280(mm) ※Except protrusion
CUBEGM-X4 : W510×D400×H280(mm) ※Except protrusion
||MAX 2.3A ※In the case of 4 mass flow controllers equipped with
|Flow rate control range
||1 LINE : F.S.10SCCM～20SLM (However, the mixed gas flow rate must be less than 50 SLM)
|Flow rate control
||MFC : C1000 Series or FCST1000L Series
|Flow rate output signals
|INLET, OUTLET Valve
|Wetted surface material
||SUS316, PTFE, Fluoro-Rubber
(FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber)
||1/4in.SWL (equivalent) ※For other fitting, please contact us.
||5-50℃, 30-80％RH (Scope of accuracy guarantee : 15-35℃)
||AC cable(2m), User’s manual, Written guarantee
● May be changed items depend on the number of mass flow controller. The other specifications, please contact us.