Gas mixer [CUBEGM series] is a manual all-in-one unit equipped with mass flow controller, control power supply, valve, check valve, gas mixer. Simply connect the piping to the IN side and OUT side. [CUBEGM Series] is a device which supplies a mixed gas species of 2, 3, 4 to set up and control to any of the flow rate.
Can be reduced the cost when you use a Gas mixer than you purchase gas cylinders that has been prepared in the mixing ratio. In addition to the standard type, it is available to design and manufacture in response to customer’s specifications or budget. Please feel free to contact us.
- [CUBEGM Seires] is an all-in-one unit which have mass flow controller, control power supply, valve, check valve and gas mixer.
- Simply connect the piping to the IN side and OUT side.
||CUBEGM2 : W315×D298×H250(mm) ※Except protrusion
CUBEGM3 : W415×D298×H250(mm) ※Except protrusion
CUBEGM4 : W515×D298×H250(mm) ※Except protrusion
||MAX 1A ※In the case of 4 mass flow controllers equipped with
|Flow rate control range
||1 LINE : F.S.10SCCM～20SLM (However, the mixed gas flow rate must be less than 50 SLM)
|Flow rate control
||MFC : C1000 Series or FCST1000L Series
|Flow rate output signals
|INLET, OUTLET Valve
|Wetted surface material
||SUS316, PTFE, Fluoro-Rubber
(FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber)
||1/4in.SWL (equivalent) ※For other fitting, please contact us.
||5-50℃, 30-80％RH (Scope of accuracy guarantee : 15-35℃)
||AC cable(2m), User’s manual, Written guarantee
● May be changed items depend on the number of mass flow controller. The other specifications, please contact us.