FCON CUBE MFC Series Mass Flow Controller

Control Power Supply and Mass Flow Controller Model 1000 Series has become the all-in-one. It can be used by connecting the gas fitting and power outlet.

Description

Control Power Supply and Mass Flow Controller Model 1000 Series has become the all-in-one. It can be used by connecting the gas fitting and power outlet. Can be used with AC85-260V. This product is ideal for use on the desktop, space saving.

Mass flow Controller controls the gas flow automatically by an electric signal. In order to control the flow rate by measuring mass of a gas, corrections of ambient temperature or use pressure is not required. It uses a variety of process such as semiconductor, flat panel display, solar cell panel, that is required high accuracy. However, our products can be used any process, for example, it can be used in industries such as gas filling, gas welding, sintering, vapor deposition, coating, film formation, optical fiber, analysis,environment related equipment.

  • Mass flow controller 1000 series and control power supply are all-in-one compact flow control unit.
  • It can be used by connecting the gas fitting and power outlet.
  • The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
  • Input & Output Signal : Analog (0~5VDC).

Brand

FCON

FCON

We aim to become a company that is continually welcomed by society by providing products and services based on unique technology and new value creation. FCON main business is design development, manufacture and sale of mass flow controllers and their applied products.

Features

  • Mass flow controller 1000 series and control power supply are all-in-one compact flow control unit.
  • It can be used by connecting the gas fitting and power outlet.
  • The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
  • Input & Output Signal : Analog (0~5VDC).
  • Equipped with monitor terminal for setting / output voltage on the back.
  • This product is ideal for use on the desktop, space saving.
  • If you mount the main body and set the operation part in the panel cut part, it can be incorporated in various kinds of equipment.
  • Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
  • 1000 series has a flow rate accuracy of ± 1% F.S.
  • Can be supported.
  • Please contact us for details such as available gas types and flow rates.

Applications

  • Various Gases (Please consult about corrosive gas)

Specifications

Compact Flow Control Unit CUBE MFC 1005/1020/1030/1050/1100
Compact Flow Meter Unit CUBE MFM 1005/1020/1030/1050/1100
Mass Flow Controller/Meter 1000 series
Gas species Depends on MFC selected
Flow range (N2equivalent) 10SCCM~100SLM
Gases Various Gases (Please consult about corrosive gas)
Valve type NO : Normally Open (Excluding Mass Flow Meter)
Flow rate control range 5~100% F.S.(Excluding Mass Flow Meter)
Accuracy ±2% F.S [※±1% F.S Compatible] (Accuracy guaranteed between 15-35℃) ※Please contact us for details.
Setting signal 0.25~5VDC (Excluding Mass Flow Meter)
Output signal 0~5VDC / Display : Scaling display (Setting signals and output signals can be displayed by switching the switches.)
Repeatability ±0.2% F.S
Response ≦6sec
Operating differential pressure Depends on MFC selected
Pressure resistance 1MPa(G)
Operating temperature 5-50℃(Accuracy guaranteedbetween 15~35℃), ≦85%RH(No condensation permitted)
Leak integrity 1×10-7Pa・m3/sec He
Drive power source 100-240VAC : ≦500mA
Communication Analog : 0~5VDC
Wetted surface material SUS316L, PTFE, Fluoro-Rubber
Seal material Fluoro-Rubber
Actuator system Thermal (Excluding Mass Flow Meter)
Surface treatment Machined finish
Standard fitting 1/4in.SWL (equivalent), One-touch fittings,  ※ For other fitting, please contact us.
Accessory Power cord, User’s manual, Written guarantee