Kofloc Model EX-250S Mass Flow Meter

Digital mass flow device which is adopted the own developed both stable high speed thermal sensor and small proportional solenoid valve and is realized high accuracy and quick response with RS 485 communication in spite of compact

Description

Digital mass flow device which is adopted the own developed both stable high speed thermal sensor and small proportional solenoid valve and is realized high accuracy and quick response with RS 485 communication in spite of compact

Brand

Kofloc

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC’s corporate motto is “A Scientific Approach for Fluids.” In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Features

  • Metal sealing design
  • Lower cost but high accuracy measurement.
  • High speed response and zero stability.
    0-5VDC or 4-20mA input/output signal and +/-15VDC or 24VDC power supply.
  • Mediocrity D-sub 9pin.
  • Gases registered in EX-550 are usable by rotary-switch.
  • *Calculate the flow rate with conversion factor based on N2 gas.
  • RoHS compliance, CE marked.

Specification

Model Mass Flow Controller Mass Flow Meter
EX-550C EX-550M
Sensor type Thermal sensor
Valve type Normally closed proportional solenoid valve
Applicable gases*1 N2、Air、H2、He、Ar、O2、CO2 etc.
(Gases not specifically mentioned here are subject to calibration for N2 equivalent.)
Flow range*2 10SCCM ~ 5SLM
Controlmeasurerange 2 ~ 100%(F.S.)
Response ≤ 1sec (within ± 2%F.S.)(*4)
Accuracy ± 1.0%S.P. (25%F.S. ~ 100%F.S.) , ± 0.25%F.S. ( ~ 25%F.S.)
Repeatability ± 0.2%FS
Operating differential pressure*3 50 ~ 300kPa(Ar、CO2:100kPa ~ 300kPa)
Inlet maximum pressure 350kPa(G)
Proof pressure 980kPa(G)
External leak rateHe ≤ 1.0 × 10-11Pa・m3/sec
Temperature Working temp. 5 ~ 50℃
Accuracy guaranteed temp. 15 ~ 35℃
Allowable storage temp. -10 ~ 60℃
Allowable operating humidity 10 ~ 90%RH(without dew condensation)
Materials of gas contact part SUS316L、PTFE、Ni-Co
Electrical connection Dsub 9pin KFC Standard(SEMI standard compliant)
HR-10A × 2
Flow rate setting signal 0~5VDC(input impedance: approx. 1M Ω)
or 4~20mA(input impedance: approx. 250 Ω)
Flow rate output signal 0 ~ 5VDC( load resistance ≧10k Ω)
or 4 ~ 20mA( load resistance ≧500 Ω)
Digital communication RS485 rotary-switch address setting
Required power supply (DC) +15VDC( ± 5%)100mA , -15VDC(± 5%)150mA
or +24VDC(± 10%) ≤180mA  (MFM would be ≤100mA)
Joint 1/4VCR
Mounting posture Free
Weight Approx.800g  Approx.550g

 

(*1) The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
(*2) The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
(*3) The operating differential pressure may differ depending on specifications.
(*4) Pressure condition would be needed when you order.