Kofloc Model 3760 Standaid Mass Flow Meter

The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

Description

The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

Brand

Kofloc

Kofloc

The natural environment is preserved through the balance of solids, liquids and gases that exist on the earth. However, human civilization has caused pollution that has greatly damaged our environment. The task of the present generation is to restore our environment to its natural healthy state. And this is also the greatest challenge for 21st century science and technology.

KOFLOC's corporate motto is "A Scientific Approach for Fluids." In other words, we create products that scientifically measure and control the balance of liquids and gases. We trust that through our work we are making a contribution to the regeneration of the environment and to the establishment of a prosperous society.

Features

  • Improved constant-current temperature difference detection type flow sensor for quick response
  • The compact body permits installation at any location.

Applications

  • Air sampling
  • Analyzer component
  • Bioreactor
  • Biotechnological process
  • Burn control
  • CCFL manufacturing
  • Chamber pressure control
  • Chemical process
  • Environment monitoring
  • Electronic device manufacturing
  • Food production
  • Fuel cell testing
  • Fermentation process
  • Gas blending
  • Gas distribution
  • Gas flow monitoring
  • Gas generation
  • Industrial furnace
  • Leak testing
  • Pharmaceutical process
  • Pollution monitoring
  • Process flow control
  • R&D
  • Solar power element manufacturing
  • Secondary calibration reference
  • Semiconductor process
  • Surface treatment process
  • Thermal flame spray
  • Thin film manufacturing
  • Vapor deposition

Specification

Model 3760 3765
Flow range (N2 equivalent, 20℃/1atm) 10 SCCM–20 SLM (freely
selectable)
30 SLM–100 SLM (freely
selectable)
Sensor Thermal mass flow sensor
Response 2 sec. or less 3 sec. or less
Accuracy ±1.0%F.S. (25℃) ±1.5%F.S. (25℃)
Temperature coefficient ±0.1 F.S./℃ (15–35℃) ±0.2 F.S./℃ (15–35℃)
Repeatability ±0.5%F.S. (20℃)
Proof pressure 980kPa (G)
Leak rate 1 × 10-8 Pa·m3/s or less (excluding permeation of He)
Allowable ambient temperature 5–45℃
Allowable ambient humidity 10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316
Sealing: FKM (option: CR or NBR)
Electric connection Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate output signals 0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply +15VDC (±5%) 100mA, −15VDC (±5%)100mA
Joint (Main unit bore) Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc.
Standard: 3/8SWL
Option: 1/2SWL 3/8VCR RC3/8, etc.
Weight Approx. 800 g Approx. 1000 g

!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

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